The cutting edge thin warped_MEMS wafer handling oriented modules

✪ Diversified end-effectors

✪ Customized chucks

✪ Customized prealigners

✪ Tool retrofit for thin warped wafer, MEMS wafer, BGBM wafer, etc

 Diversified end-effectors

             Needle end-effector

             Specially designed for MEMS wafer,Taiko wafer handling

             Contactless end-effector

             Specially designed for chipside and backside(BGBM,BSM) thin warped wafer handling

             Top grip end-effector

             Specially designed for convex type(cry) chipside handling of thin warped wafer

             Edge grip end-effector

             Specially designed for MEMS wafer handling

             Bernoulli-vacuum  end-effector

             Specially designed for standard wafer handling

Customized chucks

            Needle chuck

            Specially designed for thin warped wafer, taiko wafer

            MEMS wafer chuck(4-point chuck)

             Specially designed for MEMS wafer

            Vacuum chuck

            Specially designed to flatten various thin warped wafers

Customized prealigners

           Prealigner bernoulli vacuum

            Specially designed for thin warped wafer,taiko wafer

           Prealigner edge grip

            Specially designed for MEMS wafer,thin warped wafer,taiko wafer



 The positive handling tests for the worst thin warped wafers from customers 

 video #1 > concave type(smile) thin warped wafer 

 video #2 > convex type(cry) thin warped wafer

 video #3 > convex type(cry) thin warped wafer in liquid process environment